Mass Flow Controller from MKS Instruments Helps to Study Plasma in Space
The original PK-4 laboratory module already features a GE50A Mass Flow Controller and other MKS instruments such as the 750C High Pressure Baratron® Absolute Capacitance Manometer, a 640B Absolute Pressure Controller and a 910 Absolute Piezo Vacuum Transducer.
The GE50A is used to control the flow of Neon, Argon and mixtures of both gases. Its high accuracy and flexibility in terms of multi-gas, multi-range and communications were the main reasons for integrating the MKS GE50A in the new ExpIF extension module.
For additional information on the MKS Instruments General Purpose GE50A Mass Flow Controller, please visit https://www.mksinst.com/product/product.aspx?ProductID=1362.
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About MKS Instruments
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration control and optics. We also provide services relating to the maintenance and repair of our products, installation services and training. Our primary served markets include the semiconductor, industrial technologies, life and health sciences, research and defense. Additional information can be found at www.mksinst.com.
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Source: MKS Instruments, Inc.