SEC FORM 3 SEC Form 3
FORM 3 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940
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1. Name and Address of Reporting Person*
Batra Raj

(Last) (First) (Middle)
2 TECH DRIVE, SUITE 201

(Street)
ANDOVER MA 01810

(City) (State) (Zip)
2. Date of Event Requiring Statement (Month/Day/Year)
10/01/2018
3. Issuer Name and Ticker or Trading Symbol
MKS INSTRUMENTS INC [ MKSI ]
4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
X Director 10% Owner
Officer (give title below) Other (specify below)
5. If Amendment, Date of Original Filed (Month/Day/Year)
6. Individual or Joint/Group Filing (Check Applicable Line)
X Form filed by One Reporting Person
Form filed by More than One Reporting Person
Table I - Non-Derivative Securities Beneficially Owned
1. Title of Security (Instr. 4) 2. Amount of Securities Beneficially Owned (Instr. 4) 3. Ownership Form: Direct (D) or Indirect (I) (Instr. 5) 4. Nature of Indirect Beneficial Ownership (Instr. 5)
Table II - Derivative Securities Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 4) 2. Date Exercisable and Expiration Date (Month/Day/Year) 3. Title and Amount of Securities Underlying Derivative Security (Instr. 4) 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form: Direct (D) or Indirect (I) (Instr. 5) 6. Nature of Indirect Beneficial Ownership (Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Explanation of Responses:
Remarks:
Exhibit 24 - Power of Attorney
No securities are beneficially owned.
/s/ M. Kathryn Rickards, attorney-in-fact 10/01/2018
** Signature of Reporting Person Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 5 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.
							Exhibit 24

LIMITED POWER OF ATTORNEY FOR SECTION 16 REPORTING OBLIGATIONS

Know all by these present that the undersigned hereby constitutes
and appoints each of Kathleen F. Burke, Renee M. Donlan and
M. Kathryn Rickards, signing singly, the undersigned's true and 
lawful attorney-in-fact to:

1)	execute for and on behalf of the undersigned, in the 
undersigned's capacity as an officer and/or director of MKS 
Instruments, Inc. (the "Company"), Forms 3, 4, 5 and  144 
(collectively, the ?Forms?) in accordance with Section 16(a) 
of the Securities Exchange Act of 1934 and the rules thereunder;

2)	do and perform any and all acts for and on behalf of the 
undersigned which may be necessary or desirable to complete and 
execute any such Forms, complete and execute any amendment or 
amendments thereto, and timely file such Forms with the United 
States Securities and Exchange Commission and any stock exchange 
or similar authority; and

3)	take any other action of any type whatsoever in connection 
with the foregoing which, in the opinion of such attorney-in-fact, 
may be of benefit to, in the best interest of, or legally required by,
the undersigned, it being understood that the documents executed by 
such attorney-in-fact on behalf of the undersigned
 pursuant to this 
Limited Power of Attorney shall be in such form and shall contain such 
terms and conditions as such attorney-in-fact may approve in such 
attorney-in-fact's discretion.

The undersigned hereby grants to each such attorney-in-fact full power 
and authority to do and perform any and every act and thing whatsoever 
requisite, necessary, or proper to be done in the exercise of any of 
the rights and powers herein granted, as fully to all intents and 
purposes as the undersigned might or could do if personally present, 
with full power of substitution or revocation, hereby ratifying and 
confirming all that such attorney-in-fact, or such attorney-in-fact's 
substitute or substitutes, shall lawfully do or cause to be done by 
virtue of this Limited Power of Attorney and the rights and powers 
herein granted.  The undersigned acknowledges that the foregoing 
attorneys-in-fact, in serving in such capacity at the request of 
the undersigned, are not assuming, nor is the Company assuming, 
any of the undersigned's responsibilities to comply with Section 
16 of the Securities Exchange Act of 1934.

This Limited Power of Attorney shall supersede any power of attorney 
previously granted by the undersigned with respect to the subject 
matter herein and shall remain in full force and effect until the 
undersigned is no longer required to file Forms 3, 4, 5 and 144 
with respect to the undersigned's holdings of and transactions in 
securities issued by the Company, unless earlier revoked by the 
undersigned in a signed writing delivered to the foregoing 
attorneys-in-fact. This Limited Power of Attorney may be filed 
with the SEC as a confirming statement of the authority 
granted herein.

IN WITNESS WHEREOF, the undersigned has caused this Limited Power 
of Attorney to be executed as of this 25 day of September 2018.

/s/ Raj Batra
_________________________
Rajeev Batra