v3.19.3.a.u2
Document and Entity Information
Feb. 10, 2020
Cover [Abstract]  
Entity Registrant Name MKS INSTRUMENTS INC
Amendment Flag false
Entity Central Index Key 0001049502
Document Type 8-K
Document Period End Date Feb. 10, 2020
Entity Incorporation State Country Code MA
Entity File Number 000-23621
Entity Tax Identification Number 04-2277512
Entity Address, Address Line One 2 Tech Drive
Entity Address, Address Line Two Suite 201
Entity Address, City or Town Andover
Entity Address, State or Province MA
Entity Address, Postal Zip Code 01810
City Area Code 978
Local Phone Number 645-5500
Written Communications false
Soliciting Material false
Pre Commencement Tender Offer false
Pre Commencement Issuer Tender Offer false
Security 12b Title Common Stock, no par value
Trading Symbol MKSI
Security Exchange Name NASDAQ
Entity Emerging Growth Company false